| Form type | Sec Links | Description | Filing date | Reporting date |
|---|---|---|---|---|
| SC 13G/A | Report | SCHEDULE 13G/A | Feb 13, 2024 | |
| SC 13G/A | Report | Jan 25, 2024 | ||
| SC 13G/A | Report | SEC SCHEDULE 13G | Feb 13, 2023 | |
| SC 13G/A | Report | SCHEDULE 13G/A | Feb 9, 2023 | |
| SC 13G | Report | Jan 30, 2023 | ||
| SC 13G/A | Report | SEC SCHEDULE 13G | Feb 11, 2022 | |
| SC 13G/A | Report | PRIMECAP MANAGEMENT CO/CA/ | Feb 10, 2022 | |
| SC 13G/A | Report | SCHEDULE 13G/A | Feb 10, 2022 | |
| SC 13G/A | Report | PRIMECAP MANAGEMENT CO/CA/ | Feb 8, 2022 | |
| SC 13G/A | Report | Feb 1, 2022 | ||
| SC 13G | Report | SEC SCHEDULE 13G | Feb 16, 2021 | |
| SC 13G/A | Report | SC 13G/A | Feb 12, 2021 | |
| SC 13G/A | Report | SCHEDULE 13G/A | Feb 10, 2021 | |
| SC 13G/A | Report | SEC SCHEDULE 13G | Feb 4, 2021 | |
| SC 13G/A | Report | Jan 29, 2021 | ||
| SC 13G/A | Report | SC 13G/A | Feb 12, 2020 | |
| SC 13G/A | Report | SCHEDULE 13G/A | Feb 12, 2020 | |
| SC 13G/A | Report | Feb 5, 2020 | ||
| SC 13G/A | Report | SEC SCHEDULE 13G | Jan 27, 2020 | |
| SC 13G/A | Report | SEC SCHEDULE 13G | Feb 12, 2019 | |
| SC 13G/A | Report | Feb 11, 2019 | ||
| SC 13G/A | Report | SC 13G/A | Feb 8, 2019 | |
| SC 13G/A | Report | Feb 6, 2019 | ||
| SC 13G/A | Report | SC 13G/A | Feb 27, 2018 | |
| SC 13G | Report | SEC SCHEDULE 13G | Feb 8, 2018 | |
| SC 13G/A | Report | Feb 8, 2018 | ||
| SC 13G/A | Report | Feb 8, 2018 | ||
| SC 13G/A | Report | NONE | Nov 7, 2017 | |
| SC 13G/A | Report | SC 13G/A | Feb 9, 2017 | |
| SC 13G/A | Report | Jan 25, 2017 | ||
| SC 13G/A | Report | Jan 19, 2017 | ||
| SC 13G/A | Report | Jan 10, 2017 | ||
| SC 13G/A | Report | SC 13G/A | Aug 10, 2016 | |
| SC 13G/A | Report | KLA TENCOR CORP | Feb 22, 2016 | |
| SC 13G/A | Report | SC 13G/A | Feb 12, 2016 | |
| SC 13G/A | Report | SC 13G/A | Feb 12, 2016 | |
| SC 13G/A | Report | Feb 10, 2016 | ||
| SC 13G/A | Report | Feb 10, 2016 | ||
| SC 13G/A | Report | Jan 19, 2016 | ||
| SC 13G/A | Report | SC 13G/A | Dec 10, 2015 | |
| SC 13G/A | Report | SC 13G/A | Dec 10, 2015 | |
| SC 13G/A | Report | Dec 7, 2015 | ||
| SC 13G/A | Report | SC 13G/A | Feb 13, 2015 | |
| SC 13G/A | Report | SC 13G/A | Feb 13, 2015 | |
| SC 13G/A | Report | SC 13G/A | Feb 13, 2015 | |
| SC 13G | Report | KLA TENCOR | Feb 12, 2015 | |
| SC 13G/A | Report | Feb 10, 2015 | ||
| SC 13G/A | Report | Jan 15, 2015 | ||
| SC 13G | Report | SC 13G | Oct 9, 2014 | |
| SC 13G/A | Report | Mar 7, 2014 | ||
| SC 13G | Report | SC 13G | Mar 7, 2014 | |
| SC 13G/A | Report | SC 13G/A | Feb 13, 2014 | |
| SC 13G/A | Report | Feb 11, 2014 | ||
| SC 13G | Report | Jan 28, 2014 | ||
| SC 13G/A | Report | SC 13G/A | Feb 13, 2013 | |
| SC 13G/A | Report | SC 13G/A | Feb 13, 2013 | |
| SC 13G/A | Report | Feb 11, 2013 | ||
| SC 13G/A | Report | SC 13G/A | Jun 8, 2012 | |
| SC 13G/A | Report | May 10, 2012 | ||
| SC 13G/A | Report | SC 13G/A | Feb 14, 2012 | |
| SC 13G/A | Report | Feb 14, 2012 | ||
| SC 13G/A | Report | SC 13G/A | Feb 10, 2012 | |
| SC 13G/A | Report | SC 13G/A | Feb 9, 2012 | |
| SC 13G | Report | Feb 9, 2012 | ||
| SC 13G/A | Report | DOC ONE | Feb 14, 2011 | |
| SC 13G/A | Report | SC 13G/A | Feb 14, 2011 | |
| SC 13G/A | Report | SC 13G/A | Feb 14, 2011 | |
| SC 13G/A | Report | KLAC 12-31-10 13G/A | Feb 14, 2011 | |
| SC 13G/A | Report | SC 13G/A | Feb 11, 2011 | |
| SC 13G/A | Report | Feb 9, 2011 | ||
| SC 13G/A | Report | DOC ONE | Nov 10, 2010 | |
| SC 13G/A | Report | SC 13G/A | Oct 8, 2010 | |
| SC 13G/A | Report | DOC ONE | Aug 10, 2010 | |
| SC 13G/A | Report | DOC ONE | Feb 16, 2010 | |
| SC 13G/A | Report | KLAC 13G/A 12/31/09 | Feb 16, 2010 | |
| SC 13G | Report | Feb 12, 2010 | ||
| SC 13G/A | Report | SC 13G/A | Feb 12, 2010 | |
| SC 13G/A | Report | SC 13G/A | Feb 11, 2010 | |
| SC 13G/A | Report | SC 13G/A | Feb 9, 2010 |